ENTRY D0399 20060526 D046D039900000001 SUBENT D0399001 20060526 D046D039900100001 BIB 9 21 D039900100002 TITLE Nitrogen Profiling in Nitride Films and Nitrogen- D039900100003 Implanted Samples using the 14N(a,a) and 14N(a,p) D039900100004 Reactions at 6 MeV Incident Energy D039900100005 AUTHOR (H.Artigalas, A.Chevarier, N.Chevarier, M.El Bouanani, D039900100006 E.Gerlic, N.Moncoffre, B.Roux, M.Stern, J.Tousset) D039900100007 INSTITUTE (2FR LYO) D039900100008 REFERENCE (J,NIM/B,66,237,1992) D039900100009 SAMPLE 0.2 mu-m thick Nb(0.34)Ti(0.66)N(0.93) film deposited D039900100010 on carbon wafer. The carbon substrate and the film D039900100011 thickness have been chosen in order to enable the D039900100012 film stoichiometry determination involving 2.2 MeV D039900100013 alpha RBS. D039900100014 MONITOR The normalisation was achieved using Rutherford cross D039900100015 sections on bulk niobium. D039900100016 DETECTOR Nothing said about detector D039900100017 ERR-ANALYS (DATA-ERR) The cross section values are given with an D039900100018 accuracy of 8% including uncertainties on the D039900100019 normalisation and the standard target stoichiometry. D039900100020 (EN-ERR-DIG) Digitizing error D039900100021 (ERR-DIG) Digitizing error D039900100022 HISTORY (20060526C) SD D039900100023 ENDBIB 21 0 D039900100024 COMMON 3 3 D039900100025 ANG EN-ERR-DIG DATA-ERR D039900100026 ADEG MEV PER-CENT D039900100027 172.0 0.004 8.0 D039900100028 ENDCOMMON 3 0 D039900100029 ENDSUBENT 28 0 D039900199999 SUBENT D0399002 20060526 D046D039900200001 BIB 2 2 D039900200002 REACTION (7-N-14(A,EL)7-N-14,,DA) D039900200003 STATUS (CURVE) Data from fig. 1 digitized by compiler D039900200004 ENDBIB 2 0 D039900200005 COMMON 1 3 D039900200006 ERR-DIG D039900200007 MB/SR D039900200008 0.4 D039900200009 ENDCOMMON 3 0 D039900200010 DATA 2 44 D039900200011 EN DATA D039900200012 MEV MB/SR D039900200013 5.207 49.8 D039900200014 5.256 46.9 D039900200015 5.306 41.3 D039900200016 5.357 38.4 D039900200017 5.406 37.9 D039900200018 5.456 42.1 D039900200019 5.505 47.7 D039900200020 5.554 50.5 D039900200021 5.641 53.8 D039900200022 5.683 99.3 D039900200023 5.714 85.7 D039900200024 5.733 94.6 D039900200025 5.756 109.6 D039900200026 5.784 106.3 D039900200027 5.824 105.3 D039900200028 5.840 86.5 D039900200029 5.871 97.3 D039900200030 5.901 107.2 D039900200031 5.922 109.5 D039900200032 5.941 100.6 D039900200033 6.000 91.2 D039900200034 6.098 78.4 D039900200035 6.196 68.5 D039900200036 6.296 30.5 D039900200037 6.346 41.2 D039900200038 6.397 29.5 D039900200039 6.498 59.0 D039900200040 6.550 81.0 D039900200041 6.599 47.2 D039900200042 6.702 33.1 D039900200043 6.753 36.8 D039900200044 6.805 42.4 D039900200045 6.856 46.2 D039900200046 6.905 29.7 D039900200047 6.957 15.1 D039900200048 7.006 20.7 D039900200049 7.060 33.9 D039900200050 7.128 23.0 D039900200051 7.186 146.5 D039900200052 7.229 61.5 D039900200053 7.262 98.5 D039900200054 7.330 93.4 D039900200055 7.413 153.4 D039900200056 7.503 54.8 D039900200057 ENDDATA 46 0 D039900200058 ENDSUBENT 57 0 D039900299999 SUBENT D0399003 20060526 D046D039900300001 BIB 2 2 D039900300002 REACTION (7-N-14(A,P)8-O-17,,DA) D039900300003 STATUS (CURVE) Data from fig. 2 digitized by compiler D039900300004 ENDBIB 2 0 D039900300005 COMMON 1 3 D039900300006 ERR-DIG D039900300007 MB/SR D039900300008 0.07 D039900300009 ENDCOMMON 3 0 D039900300010 DATA 2 45 D039900300011 EN DATA D039900300012 MEV MB/SR D039900300013 5.209 7.44 D039900300014 5.259 7.41 D039900300015 5.308 7.38 D039900300016 5.357 7.82 D039900300017 5.407 8.08 D039900300018 5.456 8.05 D039900300019 5.506 9.25 D039900300020 5.556 10.35 D039900300021 5.605 9.94 D039900300022 5.655 13.22 D039900300023 5.706 18.02 D039900300024 5.754 14.30 D039900300025 5.804 14.08 D039900300026 5.850 11.87 D039900300027 5.900 13.73 D039900300028 5.948 10.96 D039900300029 5.997 8.75 D039900300030 6.047 6.07 D039900300031 6.096 4.62 D039900300032 6.146 5.82 D039900300033 6.195 5.23 D039900300034 6.244 3.78 D039900300035 6.295 3.84 D039900300036 6.345 4.57 D039900300037 6.394 4.35 D039900300038 6.446 4.22 D039900300039 6.498 6.74 D039900300040 6.546 9.46 D039900300041 6.576 33.19 D039900300042 6.597 8.01 D039900300043 6.648 6.37 D039900300044 6.697 5.20 D039900300045 6.748 4.03 D039900300046 6.799 5.99 D039900300047 6.873 10.01 D039900300048 6.955 10.15 D039900300049 7.026 10.11 D039900300050 7.055 8.01 D039900300051 7.108 10.06 D039900300052 7.152 14.10 D039900300053 7.218 3.08 D039900300054 7.307 2.84 D039900300055 7.356 2.52 D039900300056 7.405 8.08 D039900300057 7.506 8.11 D039900300058 ENDDATA 47 0 D039900300059 ENDSUBENT 58 0 D039900399999 ENDENTRY 3 0 D039999999999