ENTRY D0591 20170530 D109D059100000001 SUBENT D0591001 20170530 D109D059100100001 BIB 9 29 D059100100002 TITLE Quantification of beryllium in thin films using D059100100003 proton backscattering D059100100004 AUTHOR (J.A.Leavitt,L.C.McIntyre Jr,R.S.Champlin, D059100100005 J.O.Stoner Jr,Z.Lin,M.D.Ashbaugh,R.P.Cox,J.D.Frank) D059100100006 INSTITUTE (1USAUAZ)Department of Physics, University of D059100100007 Arizona, Tucson, AZ 85721, USA D059100100008 REFERENCE (J,NIM/B,85,37,1994) D059100100009 FACILITY (VDG,1USAUAZ)5.5 MV Van de Graaff accelerator D059100100010 INC-SOURCE backscattering (BS) spectra D059100100011 SAMPLE Self-supporting bilayer films (Be/Al,Be/Au,Be/Mn). D059100100012 Also examined were single-crystal (0001) hcp-Be films D059100100013 grown on (lll)Si and (0001)alfa-Al2O3 substrates D059100100014 by molecular beam epitaxy. D059100100015 TABLE (film characteristics) D059100100016 FILM ELEMENT (Nt([X10-15ATOMS/CM2] D059100100017 BeAu1 Au 14.7+-0.4 D059100100018 BeAu1 Be 1560+-50 D059100100019 BeAl6 Al 820+-25 D059100100020 BeAl6 Be 1780+-60 D059100100021 Bei18 Be 1990+-120 D059100100022 DETECTOR (SOLST) detector (Ortec BA-14-25-100) resolution = D059100100023 14 keV for 4He, 5keV for 1H; solid angle subtended by D059100100024 the detector was 0.78+-0.02) msr; backscattering angle D059100100025 was 170.5+-0.5 degr., with BS angles in the range D059100100026 170.5+-0.9 degr. accepted by the detector. The beam D059100100027 energy was uncertain by less than 0.08%; the beam D059100100028 energy spread was less than 2 keV. D059100100029 HISTORY (20091202C)LV, SD. D059100100030 (20170529U) VS. Correction in AUTHOR. D059100100031 ENDBIB 29 0 D059100100032 COMMON 3 3 D059100100033 EN-ERR ANG ANG-ERR D059100100034 KEV ADEG ADEG D059100100035 2. 170.5 0.5 D059100100036 ENDCOMMON 3 0 D059100100037 ENDSUBENT 36 0 D059100199999 SUBENT D0591002 20091202 D071D059100200001 BIB 3 3 D059100200002 REACTION (4-BE-9(A,EL)4-BE-9,,DA,,RTH) D059100200003 STATUS (CURVE)Curve from Fig. 2,3 from reference. D059100200004 ERR-ANALYS (DATA-ERR) Typical uncertainty D059100200005 ENDBIB 3 0 D059100200006 COMMON 3 3 D059100200007 EN-ERR-DIG ERR-DIG DATA-ERR D059100200008 KEV NO-DIM PER-CENT D059100200009 4.5 0.005 3. D059100200010 ENDCOMMON 3 0 D059100200011 DATA 2 105 D059100200012 EN DATA D059100200013 KEV NO-DIM D059100200014 577.0 0.981 D059100200015 622.0 1.038 D059100200016 673.2 1.025 D059100200017 679.5 0.980 D059100200018 724.6 1.044 D059100200019 775.7 1.025 D059100200020 775.8 0.993 D059100200021 820.6 0.993 D059100200022 871.8 0.961 D059100200023 878.4 1.063 D059100200024 878.5 1.025 D059100200025 923.2 0.999 D059100200026 974.4 1.044 D059100200027 974.6 0.967 D059100200028 1025.7 1.005 D059100200029 1077.0 1.011 D059100200030 1121.9 0.998 D059100200031 1128.4 1.043 D059100200032 1179.6 1.037 D059100200033 1179.7 0.992 D059100200034 1224.4 1.049 D059100200035 1224.6 0.985 D059100200036 1275.7 1.030 D059100200037 1275.8 0.972 D059100200038 1327.0 0.998 D059100200039 1371.9 1.023 D059100200040 1378.2 0.953 D059100200041 1423.0 0.953 D059100200042 1474.3 0.940 D059100200043 1525.5 0.914 D059100200044 1583.1 0.882 D059100200045 1634.4 0.875 D059100200046 1678.9 0.734 D059100200047 1729.8 0.619 D059100200048 1780.6 0.407 D059100200049 1831.2 0.176 D059100200050 1876.2 0.227 D059100200051 1882.8 0.266 D059100200052 1928.8 0.701 D059100200053 1981.3 1.156 D059100200054 1981.3 1.182 D059100200055 1981.4 1.214 D059100200056 2032.8 1.272 D059100200057 2033.1 1.349 D059100200058 2077.8 1.316 D059100200059 2077.9 1.342 D059100200060 2078.0 1.368 D059100200061 2078.1 1.400 D059100200062 2084.1 1.272 D059100200063 2129.0 1.284 D059100200064 2180.2 1.226 D059100200065 2180.3 1.265 D059100200066 2180.4 1.303 D059100200067 2231.3 1.169 D059100200068 2231.5 1.252 D059100200069 2276.3 1.207 D059100200070 2289.0 1.175 D059100200071 2327.6 1.213 D059100200072 2333.9 1.175 D059100200073 2385.0 1.136 D059100200074 2385.1 1.175 D059100200075 2430.0 1.149 D059100200076 2430.1 1.213 D059100200077 2487.5 1.097 D059100200078 2538.6 1.020 D059100200079 2538.8 1.110 D059100200080 2583.4 0.995 D059100200081 2634.5 0.930 D059100200082 2634.8 1.033 D059100200083 2685.9 0.981 D059100200084 2737.3 1.020 D059100200085 2782.2 1.045 D059100200086 2833.7 1.096 D059100200087 2885.0 1.122 D059100200088 2936.2 1.077 D059100200089 2936.4 1.147 D059100200090 2981.1 1.096 D059100200091 3035.5 1.123 D059100200092 3089.2 1.160 D059100200093 3135.3 1.198 D059100200094 3185.1 1.081 D059100200095 3238.9 1.196 D059100200096 3284.9 1.080 D059100200097 3334.8 1.233 D059100200098 3384.7 1.271 D059100200099 3434.6 1.347 D059100200100 3488.3 1.462 D059100200101 3538.3 1.731 D059100200102 3588.2 2.077 D059100200103 3588.2 1.884 D059100200104 3638.1 2.153 D059100200105 3688.1 2.653 D059100200106 3734.1 2.884 D059100200107 3784.1 3.114 D059100200108 3784.1 3.538 D059100200109 3834.0 3.653 D059100200110 3887.8 3.691 D059100200111 3934.2 5.963 D059100200112 3984.7 10.316 D059100200113 3984.8 10.625 D059100200114 4034.4 8.774 D059100200115 4088.1 8.658 D059100200116 4134.3 9.505 D059100200117 4188.0 9.581 D059100200118 4188.1 9.928 D059100200119 ENDDATA 107 0 D059100200120 ENDSUBENT 119 0 D059100299999 SUBENT D0591003 20091202 D071D059100300001 BIB 2 2 D059100300002 REACTION (4-BE-9(P,EL)4-BE-9,,DA,,RTH) D059100300003 STATUS (CURVE)Curve from Fig. 6 from reference. D059100300004 ENDBIB 2 0 D059100300005 COMMON 2 3 D059100300006 EN-ERR-DIG ERR-DIG D059100300007 KEV NO-DIM D059100300008 0.3 0.2 D059100300009 ENDCOMMON 3 0 D059100300010 DATA 2 27 D059100300011 EN DATA D059100300012 KEV NO-DIM D059100300013 2400.7 31.02 D059100300014 2424.6 33.32 D059100300015 2449.0 41.98 D059100300016 2449.8 40.75 D059100300017 2474.4 46.94 D059100300018 2474.4 45.51 D059100300019 2488.9 53.33 D059100300020 2498.7 59.29 D059100300021 2498.8 56.83 D059100300022 2498.9 54.37 D059100300023 2508.8 57.88 D059100300024 2514.2 58.71 D059100300025 2518.8 60.97 D059100300026 2523.4 60.16 D059100300027 2523.4 58.72 D059100300028 2528.9 58.73 D059100300029 2538.9 57.93 D059100300030 2549.0 55.28 D059100300031 2549.1 52.82 D059100300032 2549.2 46.05 D059100300033 2574.1 40.35 D059100300034 2574.2 35.43 D059100300035 2599.0 29.32 D059100300036 2623.8 24.44 D059100300037 2649.4 19.77 D059100300038 2675.0 17.15 D059100300039 2699.0 13.91 D059100300040 ENDDATA 29 0 D059100300041 ENDSUBENT 40 0 D059100399999 ENDENTRY 3 0 D059199999999