ENTRY F0258 20130314 F049F025800000001 SUBENT F0258001 20130314 F049F025800100001 BIB 9 23 F025800100002 TITLE An investigation of oxygen indiffusion during laser F025800100003 cleaning/annealing of silicon by means of the F025800100004 16O(a,a0)16O resonance scattering. F025800100005 AUTHOR (Z.L.Wang,J.F.M.Westendorp,F.W.Saris) F025800100006 INSTITUTE (2NEDNED) FOM-Institute for Atomic and Molecular F025800100007 Physics F025800100008 REFERENCE (J,NIM,211,193,1983) F025800100009 FACILITY (VDG,2NEDUTR) 3.8 MV Van de Graaff accelerator F025800100010 INC-SPECT Energy stability of the ion beam is better than 250 eV F025800100011 at 2 MeV. The energy spread for 2MeV He+ is about F025800100012 200 eV. F025800100013 SAMPLE Series of Si<100> samples, having CVD-grown oxide F025800100014 layers on the front surface, was used. The oxygen F025800100015 densities of these layers were measured with RBS at F025800100016 2 MeV. Samples were mounted on a three-axis goniometer,F025800100017 allowing channeling experiments. F025800100018 DETECTOR (SIBAR) Surface barrier detector has an energy F025800100019 resolution of 20 keV and a solid angle about 5 msr. F025800100020 The scattering angle could be varied from 100 to F025800100021 173 degrees. F025800100022 HISTORY (20050207C) F025800100023 (20130311A) Opening bracket at col. 12 in SAMPLE F025800100024 description of sub 002 was removed. F025800100025 ENDBIB 23 0 F025800100026 NOCOMMON 0 0 F025800100027 ENDSUBENT 26 0 F025800199999 SUBENT F0258002 20130314 F049F025800200001 BIB 4 6 F025800200002 REACTION (8-O-16(A,EL)8-O-16,,DA,,REL) F025800200003 SAMPLE Thickness of target was 177 angstrom, areal F025800200004 density was (8.14+-0.31)*10**16 at/cm2. F025800200005 ERR-ANALYS (EN-ERR-DIG) Energy digitizing error F025800200006 (ERR-DIG) Data digitizing error F025800200007 STATUS (CURVE)Fig.1 F025800200008 ENDBIB 6 0 F025800200009 COMMON 3 3 F025800200010 ANG EN-ERR-DIG ERR-DIG F025800200011 ADEG KEV ARB-UNITS F025800200012 164. 0.1 0.2 F025800200013 ENDCOMMON 3 0 F025800200014 DATA 2 11 F025800200015 EN DATA F025800200016 KEV ARB-UNITS F025800200017 3028.9 30.765 F025800200018 3032.9 39.304 F025800200019 3035.9 53.771 F025800200020 3038.8 75.309 F025800200021 3040.7 100.91 F025800200022 3042.6 119.06 F025800200023 3044.7 115.66 F025800200024 3046.7 84.322 F025800200025 3048.8 53.589 F025800200026 3050.5 35.531 F025800200027 3054.7 14.851 F025800200028 ENDDATA 13 0 F025800200029 ENDSUBENT 28 0 F025800299999 SUBENT F0258003 20050623 F021F025800300001 BIB 6 12 F025800300002 REACTION 1(8-O-16(A,0),,EN) F025800300003 2(8-O-16(A,TOT),,WID) F025800300004 SAMPLE Thickness of target was 177angstroem, areal density wasF025800300005 (8.14+-0.31)*10**16 at/cm2. F025800300006 METHOD Scattering angle in these measurements was fixed at 164F025800300007 degrees. F025800300008 ANALYSIS Rutherford background was substracted. In the F025800300009 calculation of resonance energy the energy loss over F025800300010 the oxide layer was taken into account. F025800300011 ERR-ANALYS (DATA-ERR) Estimated uncertainty in the energy F025800300012 calibration of the accelerator F025800300013 STATUS Data from text. F025800300014 ENDBIB 12 0 F025800300015 NOCOMMON 0 0 F025800300016 DATA 4 1 F025800300017 DATA 1DATA-ERR 1DATA 2DATA-ERR 2 F025800300018 KEV KEV KEV KEV F025800300019 3042.0 3.0000 10.200 0.40000 F025800300020 ENDDATA 3 0 F025800300021 ENDSUBENT 20 0 F025800399999 SUBENT F0258004 20050623 F021F025800400001 BIB 4 16 F025800400002 REACTION (8-O-16(A,EL)8-O-16,,DA,,AV) F025800400003 FLAG (1.) Thickness of target was 261 angstroem, areal F025800400004 density was (1.2+-0.03)*10**17 at/cm2, energy loss was F025800400005 5.3 keV, energy straggling was 1.27 keV. F025800400006 (2.) Thickness of target was 177 angstroem, areal F025800400007 density was (8.14+-0.31)*10**16, energy loss was 3.6 F025800400008 keV, energy straggling was 1.02 keV. F025800400009 (3.) Thickness of target was 90 angstroem, areal F025800400010 density was (4.15+-0.14)*10**16, energy loss was 1.8 F025800400011 keV, energy straggling was 0.76 keV. F025800400012 ANALYSIS Nuclear resonance cross section is averaged over the F025800400013 thickness analysed. This averaged cross section was F025800400014 measured by comparing the 16O(a,a0)16 yield at the F025800400015 resonance energy with that at 2MeV,i.e. for RutherfordF025800400016 backscattering using the standard samples. F025800400017 STATUS (TABLE)Table 2 F025800400018 ENDBIB 16 0 F025800400019 COMMON 2 3 F025800400020 ANG EN F025800400021 ADEG MEV F025800400022 164. 2. F025800400023 ENDCOMMON 3 0 F025800400024 DATA 2 3 F025800400025 DATA FLAG F025800400026 B/SR NO-DIM F025800400027 0.74000 1.0000 F025800400028 0.72100 2.0000 F025800400029 0.72900 3.0000 F025800400030 ENDDATA 5 0 F025800400031 ENDSUBENT 30 0 F025800499999 ENDENTRY 4 0 F025899999999